AccuThermo AW820M for high quality LED thermal process

June 26, 2024

Manufacturer: Allwin21 Corp.
Condition: New
Wafer Size: Small~8 inch
Type: Stand Alone, Atmospheric
Temperature: 100~800°C or 450~1250°C. Long time and Higher temperature processes are available. Pls contact us for detail.
Lamp Zones: 10 from Jan. 2022

Gas Lines: 1 ~ 6 lines
Options: Integrated solid robotic wafer transfer ; SMIF (Standard Mechanical Interface) load port transfer. Add Double O Ring and/or O2 Sensor/Analyzer for O2 sensitive applications and saving GaAs, InP, GaN, GaInP, SiC and other valuable compound material wafers.

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