Forepi receives double boost from Aixtron G4 systems and Yield+ retrofits

Date Announced: 05 Dec 2007

Aachen/Germany -- AIXTRON AG today announced it had received an order for several new AIX 2800G4 high capacity MOCVD reactors from Lung-Tan, Taoyuan, Taiwan, based company Forepi Formosa Epitaxy Inc.

Forepi also ordered the Yield+ package to retrofit several of their existing systems.

The combination will therefore doubly augment Forepi's manufacturing capacities for high performance gallium nitride based epitaxial wafers, chips and ultra-high-brightness LED chip related products.

Dr. Fen Ren Chien, President for Forepi comments: "We are very satisfied with the performance of our AIXTRON systems but with the new Yield+ package we could even improve our results. It was therefore natural, that when we came to order additional new G4 systems already including it, we should at the same time bring several of our existing reactors up to the same process performance.

"AIXTRON Planetary Reactor systems provide excellent uptime, reproducibility, uniformity and cost-of-ownership and AIXTRON's local Service Team delivers first class support."

The Yield+ package features improved robustness and reproducibility for epitaxial growth. It provides better wavelength uniformity tuning thanks to an actively cooled gas inlet - which minimizes pre-reactions - and a triple gas injector, which offers an enhanced range of tuning parameters. These features guarantee higher throughput, better yield and cost per wafer for even higher LED performance.

Contact
AIXTRON AG Phone: +49 241 8909 351 Fax: +49 241 8909 522

E-mail:A.Maichin@aixtron.com

Web Site:www.aixtron.com

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