Epivalley orders three Crius growth systems from Aixtron

Date Announced: 22 Aug 2007

Aachen/Germany -- AIXTRON AG has received a further repeat order from EpiValley Co., Ltd., headquartered in Kwangju City, South Korea in the second quarter of 2007.

Epivalley, a long-term AIXTRON customer purchased three new Thomas Swan Close Coupled Showerhead (CCS) CRIUS production epitaxy reactors.

The three CRIUS systems with a capacity of 30 x 2-inch wafers will be dedicated to the manufacture of high brightness gallium nitride (GaN) based epitaxial wafers for the production of side-view LEDs.

Dr. D.J. Park, president and CEO of EpiValley Co., Ltd., said: "We have been very happy with our first Thomas Swan CCS CRIUS MOCVD tool which was commissioned and providing us with wafers in a very short time.

"Now that our customers are ramping up their production of side-view LEDs we must quickly increase wafer throughput. Therefore we decided to place this triple order.

"With all four CRIUS systems in place we will be able to satisfy the twin requirements of performance and price for the vast LED back-light unit (BLU) and solid-state lighting market."

EpiValley, manufacturer of epiwafers for blue, green, and UV LED and LED chips was the first to commission the CCS CRIUS system – one of the world’s most productive MOCVD systems for production of GaN-based LEDs and was among the first companies world-wide to produce high brightness blue LED epi-wafers on the CRIUS tool as reported by AIXTRON before.

Contact
AIXTRON AG, Aachen, Germany Phone: +49 241 8909 351 Fax: +49 241 8909 522

E-mail:A.Maichin@aixtron.com

Web Site:www.aixtron.com

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