Nanometrics’ VerteX PL Mapping System Installed at Philips MiPlaza

March 29, 2007
Date Announced: 29 Mar 2007 Milpitas, Calif., March 29, 2007 — Nanometrics Incorporated (Nasdaq: NANO), the leading supplier of both advanced integrated and standalone metrology equipment for the semiconductor and related industries, today announced the successful installation of its recently introduced VerteX photoluminescence mapping system at the Philips Electronics Microsystems Plaza (MiPlaza) R&D Facilities located on the High Tech Campus in Eindhoven, Netherlands. The Vertex will be shared by all users of the MiPlaza facility, including the leading-edge optoelectronics foundry company, Cedova.“We are pleased that Philips selected our new VerteX for the MiPlaza facility,” said Tom Ryan, Nanometrics' product marketing manager for compound semiconductors. “This facility is well known for its 'open innovation' approach to achieving technology breakthroughs. As such, systems selected for installation here must meet incredibly high standards for both technology and quality. We look forward to continuing our ongoing fruitful relationship with Philips as well as growing our association with the staff and users at MiPlaza and Cedova." MiPlaza is one of the largest shared research service facilities in the world, fostering development of new technologies in the fields of micro-systems and nanotechnologies. In addition to supporting several divisions of Royal Philips Electronics and a diverse mix of other high-tech companies, the facility also is shared by the Dutch Foundation for Fundamental Research on Matter.“Because the MiPlaza is a shared facility, characterization equipment has to be versatile enough to support a wide range of applications,” said Frank Dirne, Head of MiPlaza’s Thin Film Facilities. “At the same time, it has to satisfy highly demanding specifications for use as a process control tool to support the fabrication of thin film devices. We believe that VerteX can fulfill both roles, as well as provide the predictive capabilities needed to accelerate technology innovation.”The Nanometrics VerteX, launched in October 2006, is the most advanced photoluminescence mapping system available today and marks the first automated PL mapping system that accurately predicts emission wavelengths for green LEDs at the wafer level. This enables the predictive metrics required for volume production of LEDs, particularly green LEDs. Green LEDs are vital for RGB-based LED displays and solid-state lighting applications. About MiPlaza MiPlaza (Microsystems Plaza) provides world-class research services, expertise, and infrastructure, enabling high tech organizations to carry out their research in the most efficient way and accelerate their pace of innovation. Located at the High Tech Campus Eindhoven, The Netherlands, MiPlaza operates in an Open Innovation environment, working with high-tech global companies, start-ups, research institutes and entrepreneurs in a networked ecosystem. MiPlaza is part of Philips Research, and is one of the largest shared research service facilities in the world. The MiPlaza website is CedovaCedova is a leading-edge, pure-play, provider of foundry services to the optoelectronics industry specializing in the fabrication of customer specific designs across a wide range of opto materials and devices. The Company, founded in 2004, has a team with a substantial expertise and track record within the optoelectronics industry. Its unique location, on the Philips MiPlaza site, gives the company access to World-class growth and diagnostic facilities. The Cedova website is http://www.cedova.comAbout NanometricsNanometrics is a leader in the design, manufacture and marketing of high-performance process control metrology systems used in semiconductor manufacturing. Nanometrics metrology systems measure various thin film properties, critical dimensions, overlay control and optical, electrical and material properties, including the structural composition of silicon and compound semiconductor devices, during various steps of the manufacturing process. These systems enable semiconductor manufacturers to improve yields, increase productivity and lower their manufacturing costs. The Company maintains its headquarters in Milpitas, California, with sales and service offices worldwide. Nanometrics is traded on NASDAQ Global Market under the symbol NANO. Nanometrics’ website is

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