Plasma-Therm announces sale of three PECVD systems to LED maker

April 20, 2010
Date Announced: 20 Apr 2010 St. Petersburg, FL – Plasma-Therm LLC, a global supplier of plasma process equipment, is pleased to announce the sale of three VERSLINE® PECVD systems to a leading South Korean LED manufacturer. The VERSALINE PECVD systems were purchased to meet capacity expansion needs for high quality dielectric film deposition. The systems are additional orders that complement other Plasma-Therm systems currently installed at the LED manufacturer’s fabrication facility. The systems utilize Plasma-Therm’s fully integrated EndpointWorks that facilitates accurate and repeatable real-time endpoint process control to ensure quality results.“The innovative drive within the LED industry has been consistently pushing to perfect cost efficient and energy efficient lighting solutions. We are proud to see Plasma-Therm systems at cutting-edge LED facilities working to make the next generation of solid state lighting more attractive than the last,” states Ed Ostan, Executive Vice President of Sales and Marketing at Plasma-Therm.Plasma-Therm, founded in 1974, is a supplier of advanced plasma process equipment that caters to various specialty markets including photomask, solid state lighting, thin film head and compound semiconductor. Plasma-Therm offers both dry etch & PECVD technologies. To meet the diverse needs of our global customer base, Plasma-Therm has sales, service and spares locations throughout North America, Europe and Asia-Pacific.


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