Date Announced: 19 Feb 2009 Aachen/Germany, February 17, 2009 – AIXTRON AG announced today a triple order for MOCVD tools from Tonghui Electronics Corp., a new startup and China based manufacturer of LEDs. The order is for a AIX 2800G4 HT IC Planetary Reactor system, AIXTRON’s flagship reactor for large-scale manufacturing of LEDs and other advanced devices, and two AIX 2600G3 IC systems.The AIX 2800G4 HT IC tool configured for 42x2” wafer capacity and two G3 systems with 49x2” configuration have been delivered in the first respectively third quarter of 2008. All three will be used for the development and manufacture of Power Chip LEDs.Prof. Liu, Tonghui Electronics Corp. comments: "AIXTRON has been a dependable provider and supporter of MOCVD equipment and process technology for over a decade. We have used their tools and based on this good experience we have decided to place with them our first major order for LED equipment. The large-scale reactors underpin our present and future production plans. We intend to become a renowned provider of new high performance optoelectronic devices starting with power LEDs and in future we might also add III-V concentrator photovoltaics to our production range.AIXTRON’s MOCVD tools are the best available. For Power Chip LEDs it is crucial that we have the best uniformity. In addition we will need superb production efficiency in terms of uptime, maintenance and precursor efficiency. All of these requirements will be perfectly met by AIXTRON’s equipment and its highest standards of local support and service."
Contact
AIXTRON AG Kackertstr. 15-17 52072 Aachen Germany
E-mail:[email protected]
Web Site:www.aixtron.com
