SemiLEDs boosts LED epiwafer production with 4-inch MOCVD tool

Dec. 15, 2009
Date Announced: 15 Dec 2009 Aachen/Germany -– AIXTRON AG announced today that in the third quarter 2009 SemiLEDs placed an order for one Close Coupled Showerhead® CRIUS® MOCVD system in a 7x4 inch configuration. The system will be delivered in the fourth quarter 2009 and installed at the company's state of the art 4-inch LED chip line at its production facility in Taiwan.Dr. Chuong Tran, President and COO of SemiLEDs, comments, "We have chosen the AIXTRON CRIUS® system equipped with the Dynamic Reactor Height Adjustment feature, which facilitates growth at elevated pressures, providing an advantage for our proprietary MVP structure. Plus, we particularly appreciate their responsive back-up service ensuring we can meet our production obligations.”Dr. Christian Geng, Vice President Greater China of AIXTRON, adds: “We are looking forward to this 4-inch project as it is the first Close Coupled Showerhead® Reactor to complement the existing manufacturing line of Planetary Reactor® systems at SemiLEDs.”For further information on AIXTRON AG (FSE: AIXA, ISIN DE000A0WMPJ6; NASDAQ: AIXG, ISIN US0096061041) please consult our website at:

Marketing Communications AIXTRON AG Kaiserstr. 98 52134 Herzogenrath, Germany Phone: +49 241 8909 474 Fax: +49 241 8909 522

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