CODE V 9.81 delivers enhancements for advanced fabrication techniques

Jan. 31, 2008
Date Announced: 31 Jan 2008 CODE V® 9.81 optical design software from Optical Research Associates (ORA®) streamlines the fabrication of optical systems by simplifying the correlation of actual test data and design parameters. For example, new aspheric lens tolerancing capabilities based on the work of ORA engineer Dr. John Rogers can be used with the CODE V Fast Wavefront Differential Tolerancing (TOR) feature to tolerance surface errors that are easily measured in production using surface profilometry. These tolerancing capabilities will be especially valuable in the fabrication of optical elements that are either machined directly in metal or plastic, or, in high-volume production, created from mold inserts that are machined.In addition, CODE V’s ability to utilize measured interferograms of actual lenses has been improved. Specifically, the Fabrication Data analysis feature now provides a way to visualize interferogram data on a lens surface, entrance pupil, or exit pupil, including the ability to see rotation and scaling effects. This simplifies the correlation of measured lens surface deformations or wavefront perturbations with design data. CODE V 9.81 also delivers enhancements that address the demand for ever smaller features in the microlithographic production of semiconductor wafers. In particular, new software functions provide direct information about the critical dimension (CD) of the image, assuming a one-dimensional, partially coherent image, which is the standard design metric for microlithography. These functions, which have been added to the Partial Coherence analysis and TOR tolerancing features, will help designers learn how small variations in lens parameters affect the CD variation across the chip, assess compensation schemes given a specified tolerance, and understand how a full polarization analysis affects process window computations. With 45 years of success as an industry leader, Optical Research Associates (ORA) is committed to delivering innovative solutions to the optics industry. With its CODE V and LightTools® software products, ORA is the world’s leading developer of optical software. ORA is also the largest independent supplier of optical design and engineering services, with more than 4,500 completed projects since the company was founded in 1963.

David Brown, Vice President of Sales and Marketing telephone 626 795-9101 FAX 626-795-0184

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