Tekcore installs first of several Dow Vaporstation Central Delivery Systems for TMG

Date Announced: 07 Mar 2011

PHILADELPHIA, PA –– Dow Electronic Materials, a business unit of Dow Advanced Materials, today announced that Tekcore Co. Ltd., a leading LED wafer and chip production company based in Taiwan, has recently installed two VAPORSTATION™ Central Delivery Systems in their LED manufacturing area.

Tekcore is now running the first tool in production to deliver trimethylgallium (TMG) to multiple epitaxial growth reactors with excellent results. The second delivery system, Dow’s new patent-pending, third-generation of the VAPORATION™ Central Delivery System, has also been installed at Tekcore and ramp-up for production has started. Tekcore’s new VAPORSTATION™ Central Delivery Systems are the first of seven the company has ordered from Dow Electronic Materials.

The VAPORSTATION™ Central Delivery System is designed to deliver TMG and other metalorganic precursors to multiple chemical vapor deposition (CVD) reactors from a central supply source cabinet using a high-purity carrier gas. This delivery technology enables users to run several reactors with no downtime for precursor cylinder change, which provides significant opportunity for increased reactor throughput and lower cost of ownership. The tool also provides greater safety in production areas as a result of less material handling.

“We are very pleased with the successful integration of the VAPORSTATION™ Central Delivery System into Tekcore’s production line” said Joe Reiser, global business director, Metalorganic Technologies, for Dow Electronic Materials.

“As we expected, they quickly began to benefit from the delivery system’s throughput, economy and safety advantages. We’re more confident than ever that the VAPORSTATION™ Central Delivery System will become the industry standard as manufacturers look for ways to eliminate costly inefficiencies, such as calibration runs and cylinder change outs associated with on-board cylinders.”

Exceptionally high-quality materials and precise delivery of metalorganic precursors are essential to building reliable LEDs. Dow Electronic Materials is the leading supplier of precursors to the LED market, including TMG, which is used to create the electroluminescent films in LED chips through a CVD process. In addition to the VAPORSTATION™ Central Delivery System, Dow Electronic Materials has several other patented delivery technologies for both liquid and solid precursors, as well as a number of patented precursors. Dow provides these precursors and delivery technologies to manufacturers that produce a wide range of compound semiconductors, including LEDs, solar cells and laser diodes.

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About Dow Electronic Materials
Dow Electronic Materials, a global supplier of materials and technologies to the electronics industry, brings innovative leadership to the semiconductor, interconnect, finishing, photovoltaic, display, LED and optics markets. From advanced technology centers worldwide, teams of talented Dow research scientists and application experts work closely with customers, providing solutions, products and technical service necessary for next-generation electronics. These partnerships energize Dow’s power to invent. Its key end-use applications include a broad range of consumer electronics from personal computers, to television monitors, cellular phones, global positioning systems, automobile safety systems, and avionics.

About The Dow Chemical Company
Dow (NYSE: Dow) combines the power of science and technology with the “Human Element” to passionately innovate what is essential to human progress. The Company connects chemistry and innovation with the principles of sustainability to help address many of the world’s most challenging problems such as the need for clean water, renewable energy generation and conservation, and increasing agricultural productivity. Dow’s diversified industry-leading portfolio of specialty chemical, advanced materials, agrosciences and plastics businesses delivers a broad range of technology-based products and solutions to customers in approximately 160 countries and in high growth sectors such as electronics, water, energy, coatings and agriculture. In 2010, Dow had annual sales of $53.7 billion and employed approximately 50,000 people worldwide. The Company’s more than 5,000 products are manufactured at 188 sites in 35 countries across the globe. References to "Dow" or the "Company" mean The Dow Chemical Company and its consolidated subsidiaries unless otherwise expressly noted. More information about Dow can be found at www.dow.com.

Contact
Jeremy Cole Dow Electronic Materials Ph: 508-229-7047

E-mail:jfcole@dow.com

Web Site:www.dow.com

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