Oxford Instruments brings PlasmaPro100 Sapphire single-wafer etch system to market

June 18, 2013
Date Announced: 18 Jun 2013 Oxford Instruments Plasma Technology a major supplier of plasma processing equipment, presents an evolution in single wafer etch technology, the PlasmaPro100 Sapphire. Designed to enable the Solid State Lighting revolution, Oxford Instruments has applied its extensive experience of etching all HBLED materials to this new system that minimises cost of ownership and maximises yield.The PlasmaPro100 Sapphire single wafer etch system offers smart solutions to produce the etch results required to maintain the manufacturers’ competitive edge in this rapidly expanding market sector.Comments Michelle Bourke, production business group director at Oxford Instruments, “The PlasmaPro100 Sapphire is designed specifically to address the harsh chemistries required for HBLED materials, delivering fast etch rates uniformly on wafers up to 200mm in diameter. At Oxford Instruments we strive to provide the most innovative, cost effective and reliable process solutions for our customers. This latest system is designed to encompass all these requirements.”Key system features and benefits include: Electrostatic Clamp technology capable of clamping sapphire, GaN on sapphire and silicon; a high power ICP source producing a high density plasma; magnetic spacer for enhanced ion control; and a high conductance pumping system delivering maximum gas throughput at low pressures. Above all it has been developed with reliability, uptime and ease of serviceability in mind.Solid-state lighting has the potential to revolutionise the lighting industry. LEDs traditionally used in displays are evolving to provide illumination for domestic use as governments legislate globally to make consumers switch to energy-efficient LEDs. As a company, Oxford Instrument’s remit is to meet customers’ needs through advanced technology, using innovation to turn smart science into world class products. This latest product innovation, the PlasmaPro100 Sapphire’s technology promises manufacturers the tools to deliver more efficient, lower cost lighting that is needed worldwide to assist this lighting revolution.About Oxford Instruments plcOxford Instruments designs, supplies and supports high-technology tools and systems with a focus on research and industrial applications. It provides solutions needed to advance fundamental physics research and its transfer into commercial nanotechnology applications. Innovation has been the driving force behind Oxford Instruments' growth and success for over 50 years, and its strategy is to effect the successful commercialisation of these ideas by bringing them to market in a timely and customer-focused fashion. The first technology business to be spun out from Oxford University over fifty years ago, Oxford Instruments is now a global company with over 1900 staff worldwide and is listed on the FTSE250 index of the London Stock Exchange (OXIG). Its objective is to be the leading provider of new generation tools and systems for the research and industrial sectors. This involves the combination of core technologies in areas such as low temperature, high magnetic field and ultra high vacuum environments, nuclear magnetic resonance, x-ray, electron and optical based metrology, and advanced growth, deposition and etching. Oxford Instruments aims to pursue responsible development and deeper understanding of our world through science and technology. Its products, expertise, and ideas address global issues such as energy, environment, security and health. About Oxford Instruments Plasma TechnologyOxford Instruments Plasma Technology offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable engineering of micro- and nano-structures. Our systems provide process solutions for the etching of nanometre sized features, nanolayer deposition and the controlled growth of nanostructures. These solutions are based on core technologies in plasma-enhanced deposition and etch, ion-beam deposition and etch, atomic layer deposition, deep silicon etch and physical vapour deposition. Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing.

Susie Williams, marketing communications manager, Oxford Instruments Plasma Technology +44(0)-1934-837028

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