Many applications in the field of optics, electronics, sensors, energy and medical technology require highly precise coatings. Fraunhofer FEP develops deposition hardware and technologies for fabrication of those optically, electrically, acoustically and magnetically effective layers and layer systems. The pulse magnetron sputtering and magnetron PECVD processes are optimized concerning precision and long term stability as well as high deposition rate and uniformity even at large substrates. The combination of these processes with precise substrate movement and optical in-situ monitoring ensure reproducible coating properties and precise layer thicknesses.

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