Corial PS200, the single-wafer platform designed for high throughput, process repeatability, and low CoO.The Corial PS200 is a 4-sided, multi-module platform with fully-automated cassette-to-cassette handling. The Corial PS200 supports 4’’, 6’’, or 8’’wafer processing with no compromise on process performance. The system handling uses Brooks’ vacuum robot and cassette elevator. The cassette size depends on substrate thicknesses. The Corial PS200 accommodates up to 3 Corial process modules, which can be a combination of RIE, ICP-RIE, or PECVD reactors from the CORIAL 200 series.
