Johnsom Matthey supplies hydrogen purifier to Epileds in Taiwan

Date Announced: 13 Nov 2006


WEST CHESTER, PA -- Johnson Matthey Gas Purification Technology (GPT) group, a global leader in the design, manufacture and distribution of highly reliable bulk and point-of-use purifiers, announced today that they have supplied a GPT-20 hydrogen purifier, capable of flowing 15 Nm3/hour to EpiLEDS in Tainan, Taiwan. The purifier will be installed in their new fab located at the Tainan Science-Based Industrial Park.

EpiLEDS is a new joint-venture created by two Taiwanese organizations, ProMOS Technologies, a Dynamic Random Access Memory (DRAM) manufacturer and Hermes-Epitek, a manufacturer of chip processing equipment including ion implementation, wafer probe, etching and inspection kits.

EpiLEDS will focus on manufacturing unpackaged blue LED chips with pilot production scheduled to start in the first quarter of 2007.

Johnson Mattheyâ?Ts state-of-the-art bulk hydrogen purifiers are capable of providing 99.9999999 percent pure hydrogen for wafer fabrication and they are the technology of
choice for epitaxy and zero-gas generators used in the calibration of the most technologically advanced analytical equipment.

About Johnson Matthey Gas Purification Technology
Backed by a reputation for superior reliability, technological expertise and customer service -- and having installed over 5,000 gas purification units around the world -- the company is a global leader in the design, engineering, manufacture and distribution of state-of-the-art purification systems for all pure, inert and specialty gases used in the semiconductor industry. The Johnson Matthey GPT group maintains locations in North America, Japan, South Korea, Singapore, Taiwan, China and Hong Kong.

Jeff Lucht, Business Manager Johnson Matthey Gas Purification Technology, 1397 King Road, West Chester, PA 19380, USA Phone: (610) 232-1968 or (800) 624-2204 Fax: (610) 232-1934

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