Genesis Photonics orders a pair of AIXTRON’s CRIUS MOCVD tools

Date Announced: 11 Jun 2008

Aachen/Germany, June 10, 2008 – AIXTRON AG is pleased to announce a new MOCVD tool order from Genesis Photonics Inc., Tainan, Taiwan, a major player in the high brightness LED market.

The two CRIUS Close Coupled Showerhead (CCS) MOCVD tools will be supplied configured as 31x2” for the manufacture of UHB GaN LED products alongside the company’s existing Close Coupled Showerhead tools.

Genesis Photonics’ Chairman David Chung comments, “Ever since Genesis was founded we have been using the CCS systems. Acknowledging the superiority of CRIUS 31x2 inch systems, Genesis decided to install two more advanced systems to further boost performance and yield rate of GaN epi wafers.

We therefore decided to migrate all of our outstanding epitaxy technology needs to the large-scale CCS technology of the CRIUS system. We have seen Close Coupled Showerhead reactors consistently prove themselves for all our LED requirements. They give us great commercial leverage thanks to its dependability along with excellent epilayer uniformity and source material efficiencies. We look forward to the forthcoming commissioning."

AIXTRON AG Phone: +49 241 8909 351 Fax: +49 241 8909 522


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