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  • Architecture + Design Master
    • Courtesy of Allwin21 Corp
    340mmx340mm_aw610m2pc

    Type: The most popular , production proven model of Desktop, Atmospheric, Manual Load/Unload RTP RTA RTO RTN. Q and A on RTP equipment.

    New Options: Add Double O Ring and/or O2 Sensor/Analyzer for O2 sensitive applications and saving GaAs, InP, GaN, GaInP, SiC and other valuable compound material wafers .

    Wafer Size: 2 to 4 inch or 3~6 inch, Silicon wafers. Use 3″/4″/6″ Susceptor or wafer carriers for small samples, compound material (GaAs , InP , GaN , SiC , GaInP , Glass , etc.) wafers and wafers with metal thin film on top during RTP process.

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