Surface Technology Systems (STS) is a manufacturer of cassette-to-cassette cluster and single/batch loadlocked ICP plasma etch and PECVD deposition systems used to fabricate Compound Semiconductor, Optoelectronic and MEMS devices. The company offers a wide range of processes for GaAs, InP, GaN, and GaP and associated material systems, used in the manufacture of VCSELs, lasers, via holes, microlenses, and LEDs.

The company offers wafer handling platforms suitable for R&D and pilot or volume production, ranging from a single wafer manual loadlock to a 4-chamber cluster system.

Headquartered in the UK, STS has Sales Offices in USA, Germany, Taiwan and Singapore, plus a network of experienced agents throughout Asia, Europe and North America, who provide dedicated local sales and service support to a worldwide customer base.