KLA-Tencor is the world leader in inspection and metrology for the semiconductor and related microelectronics industries. The Candela Series of Optical Surface Analyzers (OSA) from KLA-Tencor are advanced surface inspection and metrology systems for optoelectronic materials and semiconductor wafers.

OSA systems combine proprietary technologies to simultaneously measure surface reflectivity and topography for automatic detection and classification of defects including particles, stains, scratches, pits and bumps.

OSA technology delivers process control and yield improvement for inspection of both opaque substrates, as well as transparent materials such as sapphire and glass.